Handbook of optical metrology : principles and applications / edited by Toru Yoshizawa, NPO 3D Associates, Yokohama, Japan. - Second edition. - 1 online resource

section 1. Fundamentals of optical elements and devices -- section 2. Fundamentals of principles and techniques for metrology -- section 3. Practical applications.

9781315215952 9781351823159 9781466573611

10.1201/b18328 doi


Optical measurements--Handbooks, manuals, etc.
Metrology--Handbooks, manuals, etc.

QC367 / .H36 2015

681.25 / H236