Eranna, G.,
Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna. - 1 online resource
A Chapman and Hall book.
1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers.
9780429068393
10.1201/b17812 doi
Crystal growth.
Silicon.
QD921 / .E73 2015
548.5 / E652
Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna. - 1 online resource
A Chapman and Hall book.
1. Introduction -- 2. Silicon : the key material for integrated circuit fabrication technology -- 3. Importance of single crystals for integrated circuit fabrication -- 4. Different techniques for growing single-crystal silicon -- 5. From silicon ingots to silicon wafers -- 6. Evaluation of silicon wafers -- 7. Resistivity and impurity concentration mapping of silicon wafers -- 8. Impurities in silicon wafers -- 9. Defects in silicon wafers -- 10. Silicon wafer preparation for VLSI and ULSI processing -- 11. Packing of silicon wafers.
9780429068393
10.1201/b17812 doi
Crystal growth.
Silicon.
QD921 / .E73 2015
548.5 / E652