Micro and Nano Machined Electrometers [electronic resource] /
edited by Yong Zhu.
- 1st ed. 2020.
- V, 220 p. 141 illus., 124 illus. in color. online resource.
Introduction -- Noises in electrometers -- Commercial solid-state electrometer -- Mesoscopic SET electrometer -- NEMS based resonant electrometer -- MEMS based resonant electrometer -- MEMS based resonant electrometer -- Vibrating-reed electrometer -- Vibrating-reed electrometer -- Electrometer applications.
This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.
9789811332470
10.1007/978-981-13-3247-0 doi
Electronic circuits.
Microtechnology.
Microelectromechanical systems.
Nanotechnology.
Electronic Circuits and Systems.
Microsystems and MEMS.
Nanotechnology.
TK7867-7867.5
621.3815
Introduction -- Noises in electrometers -- Commercial solid-state electrometer -- Mesoscopic SET electrometer -- NEMS based resonant electrometer -- MEMS based resonant electrometer -- MEMS based resonant electrometer -- Vibrating-reed electrometer -- Vibrating-reed electrometer -- Electrometer applications.
This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling microscopes, and even quantum computers. Designing micro-/nano-electrometers (also known as charge sensors) for electrometry is considered vital because of the charge sensitivity and resolution issues at micro-/nano-scales. The remarkably dynamic microelectromechanical systems (MEMSs)/nanoelectromechanical systems (NEMSs), and advances in solid-state electronics, hold considerable potential for the design and fabrication of extremely sensitive charge sensors.
9789811332470
10.1007/978-981-13-3247-0 doi
Electronic circuits.
Microtechnology.
Microelectromechanical systems.
Nanotechnology.
Electronic Circuits and Systems.
Microsystems and MEMS.
Nanotechnology.
TK7867-7867.5
621.3815