Poletkin, Kirill.
Levitation Micro-Systems Applications to Sensors and Actuators / [electronic resource] : by Kirill Poletkin. - 1st ed. 2021. - IX, 174 p. 93 illus., 91 illus. in color. online resource. - Microsystems and Nanosystems, 2198-0071 . - Microsystems and Nanosystems, .
Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
9783030589080
10.1007/978-3-030-58908-0 doi
Microtechnology.
Microelectromechanical systems.
Materials.
Detectors.
Microsystems and MEMS.
Sensors and biosensors.
TK7875
621.381
Levitation Micro-Systems Applications to Sensors and Actuators / [electronic resource] : by Kirill Poletkin. - 1st ed. 2021. - IX, 174 p. 93 illus., 91 illus. in color. online resource. - Microsystems and Nanosystems, 2198-0071 . - Microsystems and Nanosystems, .
Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes.
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
9783030589080
10.1007/978-3-030-58908-0 doi
Microtechnology.
Microelectromechanical systems.
Materials.
Detectors.
Microsystems and MEMS.
Sensors and biosensors.
TK7875
621.381