Micro and Nano Fabrication (Record no. 55221)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 02518nam a22005175i 4500 |
| 001 - CONTROL NUMBER | |
| control field | 978-3-662-44395-8 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20200421111705.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 150102s2015 gw | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783662443958 |
| -- | 978-3-662-44395-8 |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 620.5 |
| 100 1# - AUTHOR NAME | |
| Author | Gatzen, Hans H. |
| 245 10 - TITLE STATEMENT | |
| Title | Micro and Nano Fabrication |
| Sub Title | Tools and Processes / |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | XXVI, 519 p. 357 illus., 54 illus. in color. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example. |
| 520 ## - SUMMARY, ETC. | |
| Summary, etc | For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Saile, Volker. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Leuthold, J�urg. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://dx.doi.org/10.1007/978-3-662-44395-8 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Berlin, Heidelberg : |
| -- | Springer Berlin Heidelberg : |
| -- | Imprint: Springer, |
| -- | 2015. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 347 ## - | |
| -- | text file |
| -- | |
| -- | rda |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Engineering. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Nanotechnology. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Manufacturing industries. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Machines. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Tools. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Industrial engineering. |
| 650 14 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Engineering. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Nanotechnology and Microengineering. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Manufacturing, Machines, Tools. |
| 650 24 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Operating Procedures, Materials Treatment. |
| 912 ## - | |
| -- | ZDB-2-ENG |
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