Surface metrology for micro- and nanofabrication / (Record no. 82503)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 04574cam a2200481 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | on1202462989 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | OCoLC |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20230516165911.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS | |
| fixed length control field | m o d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION | |
| fixed length control field | cr un|---aucuu |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 201031s2021 ne o 000 0 eng d |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | EBLCP |
| Language of cataloging | eng |
| Description conventions | pn |
| Transcribing agency | EBLCP |
| Modifying agency | YDX |
| -- | OPELS |
| -- | OCLCF |
| -- | OCLCO |
| -- | OCLCQ |
| -- | OCLCO |
| -- | K6U |
| -- | OCLCQ |
| 019 ## - | |
| -- | 1201298452 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780128178515 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0128178515 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| Canceled/invalid ISBN | 9780128178508 |
| 035 ## - SYSTEM CONTROL NUMBER | |
| System control number | (OCoLC)1202462989 |
| Canceled/invalid control number | (OCoLC)1201298452 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TA418.9.N35 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 620.50287 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Gao, Wei, |
| Titles and words associated with a name | Ph. D. |
| 9 (RLIN) | 69000 |
| 245 10 - TITLE STATEMENT | |
| Title | Surface metrology for micro- and nanofabrication / |
| Statement of responsibility, etc. | Wei Gao. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Amsterdam : |
| Name of publisher, distributor, etc. | Elsevier, |
| Date of publication, distribution, etc. | [2021] |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 online resource (452 pages) |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Content type code | txt |
| Source | rdacontent |
| 337 ## - MEDIA TYPE | |
| Media type term | computer |
| Media type code | c |
| Source | rdamedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | online resource |
| Carrier type code | cr |
| Source | rdacarrier |
| 490 1# - SERIES STATEMENT | |
| Series statement | Micro and Nano Technologies Ser. |
| 588 0# - SOURCE OF DESCRIPTION NOTE | |
| Source of description note | Print version record. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | Front Cover -- Surface Metrology for Micro- and Nanofabrication -- Copyright Page -- Dedication -- Contents -- Preface -- 1 Noncontact scanning electrostatic force microscope -- 1.1 Introduction -- 1.2 Principle of electrostatic force microscope for surface profile measurement -- 1.3 Instrumentation of electrostatic force microscope -- 1.3.1 Instrument configuration -- 1.3.2 Electrostatic force microscope probe fabrication -- 1.3.3 Electrostatic force microscope electronics -- 1.4 Characterization of the electrostatic force microscope -- 1.4.1 Tip-to-sample distance measurement |
| 505 8# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | 1.4.2 Measurement of surface topography -- 1.4.3 The vertical reciprocating scan mode -- 1.5 Summary -- References -- 2 Quartz tuning fork atomic force microscope -- 2.1 Introduction -- 2.2 Tungsten probe QTF-AFM -- 2.2.1 Self-oscillation QTF-AFM -- 2.2.2 External-oscillation QTF-AFM -- 2.3 Glass probe QTF-AFM -- 2.3.1 Fabrication of the glass probe -- 2.3.2 Optimization of the QTF glass probe -- 2.3.3 Surface profile measurement by the QTF glass probe -- 2.4 Summary -- References -- 3 Micropipette ball probing system -- 3.1 Introduction -- 3.2 Fabrication of the micropipette probe |
| 505 8# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | 3.3 The probing system -- 3.4 Measurement of microslit -- 3.5 Summary -- References -- 4 Low-force elastic beam surface profiler -- 4.1 Introduction -- 4.2 Cantilever beam surface profiler -- 4.3 Both ends supported beam surface profiler -- 4.4 Rotary die cutter edge profile measurement -- 4.5 Summary -- References -- 5 Linear-scan micro roundness measuring machine -- 5.1 Introduction -- 5.2 The stitching linear-scan method -- 5.3 Linear-scan micro roundness measuring machine -- 5.4 Improved setup with a round positioning jig -- 5.5 Summary -- References -- 6 Micro-gear measuring machine |
| 505 8# - FORMATTED CONTENTS NOTE | |
| Formatted contents note | 6.1 Introduction -- 6.2 The micro-gear measuring machine -- 6.3 Self-calibration and compensation of setting errors -- 6.4 Internal micro-gear measurement -- 6.5 Summary -- References -- 7 On-machine length gauge surface profiler -- 7.1 Introduction -- 7.2 General issues in on-machine measurement -- 7.3 Satellite mirror surface profiler -- 7.4 Scroll surface profiler -- 7.5 Summary -- References -- 8 On-machine air-bearing surface profiler -- 8.1 Introduction -- 8.2 Horizontal air-bearing profiler -- 8.3 Vertical air-bearing profiler -- 8.4 Dynamic behavior of air-bearing profiler -- 8.5 Summary |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | References-9 On-machine atomic force microscope-9.1 Introduction-9.2 On-machine spiral scan atomic force microscope-9.3 On-machine automatic alignment atomic force microscope-9.4 Summary-References-10 On-machine roll profiler-10.1 Introduction-10.2 On-machine two-probe profiler-10.3 On-machine four-probe profiler-10.4 Summary-References-11 In-process fast tool servo profiler-11.1 Introduction-11.2 Force sensor-integrated fast tool servo-11.3 In-process surface profile measurement-11.4 In-process tool setting-11.5 Summary-References. |
| 500 ## - GENERAL NOTE | |
| General note | 12 Self-calibration of probe tip radius and cutting edge sharpness. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Nanostructured materials |
| General subdivision | Measurement. |
| 9 (RLIN) | 69001 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Nanomanufacturing. |
| 9 (RLIN) | 17398 |
| 650 #6 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Nanofabrication. |
| Authority record control number or standard number | (CaQQLa)000287898 |
| 9 (RLIN) | 68562 |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Nanomanufacturing. |
| Source of heading or term | fast |
| Authority record control number or standard number | (OCoLC)fst01894718 |
| 9 (RLIN) | 17398 |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY | |
| Relationship information | Print version: |
| Main entry heading | Gao, Wei. |
| Title | Surface Metrology for Micro- and Nanofabrication. |
| Place, publisher, and date of publication | San Diego : Elsevier, �2020 |
| International Standard Book Number | 9780128178508 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Micro & nano technologies. |
| 9 (RLIN) | 69002 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Materials specified | ScienceDirect |
| Uniform Resource Identifier | <a href="https://www.sciencedirect.com/science/book/9780128178508">https://www.sciencedirect.com/science/book/9780128178508</a> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
No items available.