MEMS and nanotechnology for gas sensors / Sunipa Roy, Chandan Kumar Sarkar.
By: Roy, Sunipa [author.]
.
Contributor(s): Sarkar, Chandan Kumar [author.].
Material type: 
BookPublisher: Boca Raton : CRC Press, [2016]Copyright date: ©2016Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9781315214351; 9781351821551; 9781498700139.Subject(s): Gas detectors | Microelectromechanical systems | Detectors -- Design and construction | Nanostructured materialsAdditional physical formats: Print version: : No titleDDC classification: 681.2 Online resources: Click here to view.
Contents:
section 1. Fabrication procedure -- section 2. Sensor applications.
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section 1. Fabrication procedure -- section 2. Sensor applications.
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