Nanofabrication : principles to laboratory practice / Andrew Sarangan, University of Dayton, OH, USA.
By: Sarangan, Andrew [author.]
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Material type: 
BookSeries: Optical sciences and applications of light: Publisher: Boca Raton : CRC Press, Taylor & Francis Group, [2017]Copyright date: ©2017Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9781315370514; 9781315334363.Subject(s): Semiconductors -- Etching | Nanostructured materials -- Design and construction | Nanoelectronics -- Experiments | NanolithographyAdditional physical formats: Print version: : No titleDDC classification: 621.381531 Online resources: Click here to view.
Contents:
Chapter 1. Introduction to micro- and nanofabrication -- Chapter 2. Fundamentals of vacuum and plasma technology -- Chapter 3. Physical and chemical vapor deposition -- Chapter 4. Thin-film optics -- Chapter 5. Substrate materials -- Chapter 6. Lithography -- Chapter 7. Wet chemical and plasma etching -- Chapter 8. Doping, surface modifications, and metal contacts -- Chapter 9. Metrology for device fabrication.
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Chapter 1. Introduction to micro- and nanofabrication -- Chapter 2. Fundamentals of vacuum and plasma technology -- Chapter 3. Physical and chemical vapor deposition -- Chapter 4. Thin-film optics -- Chapter 5. Substrate materials -- Chapter 6. Lithography -- Chapter 7. Wet chemical and plasma etching -- Chapter 8. Doping, surface modifications, and metal contacts -- Chapter 9. Metrology for device fabrication.
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