Micro electro-fabrication / edited by Tanveer Saleh, Mohamed Sultan Mohamed Ali, Kenichi Takahata.
Contributor(s): Saleh, Tanveer [editor.]
| Ali, Mohamed Sultan Mohamed [editor.] | Takahata, Kenichi [editor.].
Material type: 
BookSeries: Micro & nano technologies: Publisher: Amsterdam ; Cambridge, MA : Elsevier, [2021]Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9780128231807; 0128231807.Subject(s): Nanoelectronics | Microfabrication | Nano�electronique | Microfabrication | Microfabrication | NanoelectronicsAdditional physical formats: Print version:: Micro electro-fabrication.DDC classification: 620.5 | 670 Online resources: ScienceDirect
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Includes index.
Online resource; title from digital title page (viewed on June 10, 2021).
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