Optical Metrology for Precision Engineering / Wei Gao, Yuki Shimizu.
By: Gao, Wei [author.]
.
Contributor(s): Shimizu, Yuki [author.].
Material type: 
BookPublisher: Berlin ; Boston : De Gruyter, [2021]Copyright date: ©2022Description: 1 online resource (XI, 644 p.).Content type: text Media type: computer Carrier type: online resourceISBN: 9783110542363.Subject(s): Metrology | Optical measurements | Technology & Engineering / AutomationAdditional physical formats: No title; No titleDDC classification: 681.25 Other classification: ZQ 3910 Online resources: Click here to access online | Click here to access online | Cover Issued also in print.Frontmatter -- Preface -- Contents -- Chapter 1 Laser autocollimator -- Chapter 2 Three-axis angle sensor -- Chapter 3 Surface encoder -- Chapter 4 Mosaic encoder -- Chapter 5 In-line and on-machine surface profiler -- Chapter 6 Fabrication and calibration of scale grating -- Chapter 7 Ultrashort-pulse angle sensor -- Chapter 8 Optical frequency comb -- Chapter 9 Angle comb -- Chapter 10 Chromatic confocal comb -- Chapter 11 Position comb -- Chapter 12 Optical comb applied metrology -- Index
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This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields.• Introduces fundamental theories and techniques• Combines theories with practical applications• Presents technologies in an easy-to-understand way
Issued also in print.
Mode of access: Internet via World Wide Web.
In English.
Description based on online resource; title from PDF title page (publisher's Web site, viewed 01. Dez 2022)
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