RUSKA,W.S <br/><br/>
MICROELECTRONIC PROCESSING: AN INTRODUCTION TO THE MANUFACTURE OF INTEGRATED CIR 

 - NEW YORK  McGraw-Hill  1998 
 - 24X17 
<br/><br/><label>ISBN: </label>0071002820 
<br/><br/><label>Dewey Class. No.: </label>621.38173 R956