MAY,G.S <br/><br/>
FUNDAMENTALS OF SEMICONDUCTOR MANUFACTURING AND PROCESS CONTROL 

 - New Jersey  Wiley  2006 
 - xix+463p.,24X16Cms. 
<br/><br/><label>ISBN: </label>0471784060 
<br/><br/><label>Dewey Class. No.: </label>621.38152 M466