ADAMS,T.M. <br/><br/>
INTRODUCTORY MEMS FABRICATION AND APPLICATION 

 - NEW YORK  Springer  2010 
 - xii+444p,.23x15Cms. 
<br/><br/><label>ISBN: </label>0387095103 
<br/><br/><label>Dewey Class. No.: </label>621.381 A219