Hsu, Tai-Ran. <br/><br/>
MEMS and Microsystems: Design And Manufacture 

 - New Delhi  McGraw Hill Education   2002 
 - p.436 
<br/><br/><label>ISBN: </label>9780070487093 
<br/><br/><label>Subjects--Topical Terms: </label> Miniaturization  Thermofluid  Microsystem  Silicon 
<br/><br/><label>Dewey Class. No.: </label>621.381 H87M