Gatzen, Hans H. <br/><br/>
Micro and Nano Fabrication  Tools and Processes /  [electronic resource] : 
by Hans H. Gatzen, Volker Saile, J�urg Leuthold. 
 - XXVI, 519 p. 357 illus., 54 illus. in color.  online resource. 
<br/><br/>Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example. 
<br/><br/> For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. 
<br/><br/><label>ISBN: </label>9783662443958 
<br/><br/><label>Standard No.: </label>10.1007/978-3-662-44395-8  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering.<br/>Nanotechnology.<br/>Manufacturing industries.<br/>Machines.<br/>Tools.<br/>Industrial engineering.<br/>Engineering.<br/>Nanotechnology and Microengineering.<br/>Manufacturing, Machines, Tools.<br/>Operating Procedures, Materials Treatment.
<br/><br/><label>LC Class. No.: </label>T174.7 
<br/><br/><label>Dewey Class. No.: </label>620.5