Lill, Thorsten, <br/><br/>
Atomic layer processing :  semiconductor dry etching technology / 
Thorsten Lill. 
 - 1 online resource. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>Introduction -- Fundamentals -- Thermal Etching -- Thermal Isotropic ALE -- Radical Etching -- Directional ALE -- Reactive Ion Etching -- Ion Beam Etching -- Etching Species Generation -- Emerging Etching Technologies. 
<br/><br/><label>ISBN: </label>9783527824199 3527824197 9783527824182 3527824189 
<br/><br/><label>Standard No.: </label>10.1002/9783527824199  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Etching.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7871.85 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2