Handbook of optical metrology : principles and applications /
edited by Toru Yoshizawa, NPO 3D Associates, Yokohama, Japan.
- Second edition.
- 1 online resource
section 1. Fundamentals of optical elements and devices -- section 2. Fundamentals of principles and techniques for metrology -- section 3. Practical applications.
9781315215952 9781351823159 9781466573611
10.1201/b18328 doi
Optical measurements--Handbooks, manuals, etc. Metrology--Handbooks, manuals, etc.