Poletkin, Kirill. <br/><br/>
Levitation Micro-Systems  Applications to Sensors and Actuators /  [electronic resource] : 
by Kirill Poletkin. 
 - 1st ed. 2021. 
 - IX, 174 p. 93 illus., 91 illus. in color.  online resource. 
 - Microsystems and Nanosystems,  2198-0071 .
 - Microsystems and Nanosystems, .
<br/><br/>Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes. 
<br/><br/> This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements. 
<br/><br/><label>ISBN: </label>9783030589080 
<br/><br/><label>Standard No.: </label>10.1007/978-3-030-58908-0  doi 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microtechnology.<br/>Microelectromechanical systems.<br/>Materials.<br/>Detectors.<br/>Microsystems and MEMS.<br/>Sensors and biosensors.
<br/><br/><label>LC Class. No.: </label>TK7875 
<br/><br/><label>Dewey Class. No.: </label>621.381