Zhang, Jie,  <br/><br/>
Wafer Fabrication :  Automatic Material Handling System / 
Jie Zhang. 
 - 1 online resource (XII, 272 p.) 
<br/><br/> Frontmatter --   Preface --   Contents --   1 Semiconductor wafer fabrication system --   2 Automated material handling systems in SWFSs --   3 Modeling methods of automated material handling systems in SWFSs --   4 Analysis of automated material handling systems in SWFSs --   5 Scheduling methods of automated material handling systems in SWFSs --   6 Scheduling in Interbay automated material handling systems --   7 Scheduling in Intrabay automatic material handling systems --   8 Integrated scheduling in AMHSs --   9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs --   Index 
<br/><br/> restricted access  http://purl.org/coar/access_right/c_16ec 
<br/><br/> This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. 
<br/><br/><br/>Mode of access: Internet via World Wide Web. 
<br/><br/><br/>In English. 
<br/><br/><label>ISBN: </label>9783110487473 
<br/><br/><label>Standard No.: </label>10.1515/9783110487473  doi 
<br/><br/><label>LCCN: </label>2018007853 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Manufacturing processes--Automatic control.<br/>Semiconductor wafers--Automatic control.<br/>Technology & Engineering / Manufacturing.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .Z43 2018 TK7871.85  / .Z43 2018 
<br/><br/><label>Dewey Class. No.: </label>621.39/5