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Nanofabrication [electronic resource] : Principles, Capabilities and Limits / by Zheng Cui.

By: Cui, Zheng [author.].
Contributor(s): SpringerLink (Online service).
Material type: materialTypeLabelBookPublisher: Cham : Springer International Publishing : Imprint: Springer, 2017Edition: 2nd ed. 2017.Description: XVII, 432 p. 316 illus., 50 illus. in color. online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9783319393612.Subject(s): Microtechnology | Microelectromechanical systems | Mechanics, Applied | Solids | Electronic circuits | Electrodynamics | Microsystems and MEMS | Solid Mechanics | Electronic Circuits and Systems | Classical ElectrodynamicsAdditional physical formats: Printed edition:: No title; Printed edition:: No title; Printed edition:: No titleDDC classification: 621.381 Online resources: Click here to access online
Contents:
1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies.
In: Springer Nature eBookSummary: This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.
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1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies.

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

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