Wafer Fabrication : Automatic Material Handling System / Jie Zhang.
By: Zhang, Jie [author.]
.
Contributor(s): Huazhong University of Science and Technology.
Material type: 
BookPublisher: Berlin ; Boston : De Gruyter, [2018]Copyright date: ©2018Description: 1 online resource (XII, 272 p.).Content type: text Media type: computer Carrier type: online resourceISBN: 9783110487473.Subject(s): Manufacturing processes -- Automatic control | Semiconductor wafers -- Automatic control | Technology & Engineering / ManufacturingAdditional physical formats: No title; No titleDDC classification: 621.39/5 Online resources: Click here to access online | Click here to access online | Cover 
Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index
restricted access online access with authorization star
http://purl.org/coar/access_right/c_16ec
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
Mode of access: Internet via World Wide Web.
In English.
Description based on online resource; title from PDF title page (publisher's Web site, viewed 30. Aug 2021)
There are no comments for this item.