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Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.

by May, Gary S [author.] | Spanos, Costas J | John Wiley & Sons [publisher.] | IEEE Xplore (Online service) [distributor.].

Material type: book Book; Format: available online remote Publisher: [Piscataway, New Jersey] : IEEE, c2006Distributor: [Piscataqay, New Jersey] : IEEE Xplore, [2006]Online access: Abstract with links to resource Availability: No items available

Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.

by May, Gary S [author.] | Spanos, Costas J | John Wiley & Sons [publisher.] | IEEE Xplore (Online service) [distributor.].

Material type: book Book; Format: available online remote Publisher: [Piscataway, New Jersey] : IEEE, c2006Distributor: [Piscataqay, New Jersey] : IEEE Xplore, [2006]Online access: Abstract with links to resource Availability: No items available