000 00314nam a2200121Ia 4500
008 190711s9999 xx 000 0 und d
082 _a621.38175 E46
100 _aELLIOTT,D.J
245 0 _aINTEGRATED CIRCUIT FABRICATION TECHNOLOGY
260 _aNEW YORK
_bMcGraw-Hill
_c1982
300 _a24X16
942 _cBK
_2DDC
999 _c20004
_d20004