| 000 | 00329nam a2200121Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 082 | _a621.38175 E46 | ||
| 100 | _aELLIOTT,D.J | ||
| 245 | 0 | _aMICROLITHO GRAPHY, PROCESS TECHNOLOGY FOR IC FABRICATION | |
| 260 |
_aNEW YORK _bMcGraw-Hill _c1986 |
||
| 300 | _a24X16 | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c20552 _d20552 |
||