000			00340nam a2200121Ia 4500
008			190711s9999 xx 000 0 und d
082			_a621.55 S929
100			_aSTUART.R.V
245		0	_aVACUUM TECHNOLOGY, THIN FILMS, AND SPUTTERING, INTRODUCTION, INTRODUCTION
260			_aNEW YORK _bACADEMIC _c1983
300			_a23X16
942			_cBK _2DDC
999			_c20909 _d20909