000 00379nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a0071002820
082 _a621.38173 R956
100 _aRUSKA,W.S
245 0 _aMICROELECTRONIC PROCESSING: AN INTRODUCTION TO THE MANUFACTURE OF INTEGRATED CIR
260 _aNEW YORK
_bMcGraw-Hill
_c1998
300 _a24X17
942 _cBK
_2DDC
999 _c25503
_d25503