000 00326nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a3540539255
082 _a621.38152 M589
100 _aMETEV,S.M
245 0 _aLASER - ASSISTED MICROTECHNOLOGY
260 _aBERLIN
_bSpringer
_c1994
300 _a24X16
942 _cBK
_2DDC
999 _c25694
_d25694