| 000 | 00384nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a0849308267 | ||
| 082 | _a621.381952 M182 | ||
| 100 | _aMADOU, M.J. | ||
| 245 | 0 | _aFUNDAMENTALS OF MICROFABRICATION: SCIENCE OF MINIATURIZATION | |
| 250 | _a2 | ||
| 260 |
_aBoca Raton _bCRC _c2001 |
||
| 300 | _a723p.,28X22Cms. | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c30156 _d30156 |
||