| 000 | 00404nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a352730746X | ||
| 082 | _a621.38175 B196 | ||
| 100 | _aBALTES, H. & OTHERS Edrs. | ||
| 245 | 0 | _aENABLING TECHNOLOGY FOR MEMS AND NANO DEVICES -VOL .1: ADVANCED MICRO AND NANO S | |
| 260 |
_aWeinheim _bWiley _c2004 |
||
| 300 | _axii+427p., 24X17Cms. | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c30449 _d30449 |
||