000 00346nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a3540606580
082 _a621.381 F298
100 _aFATIKOW,S
245 0 _aMICROSYSTEM TECHNOLOGY AND MICROROBOTICS
260 _aBERLIN
_bSpringer
_c1997
300 _axii+408p.,24X17Cms.
942 _cBK
_2DDC
999 _c31203
_d31203