000 00355nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a7040176637
082 _a621.381 C967
100 _aCUI, Z.
245 0 _aMICRO-NANOFABRICATION : TECHNOLOGIES AND APPLICATIONS
260 _aCHINA
_bSpringer
_c2005
300 _ax+304p., 24x16Cms.
942 _cBK
_2DDC
999 _c32312
_d32312