000 | 00355nam a2200133Ia 4500 | ||
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008 | 190711s9999 xx 000 0 und d | ||
020 | _a7040176637 | ||
082 | _a621.381 C967 | ||
100 | _aCUI, Z. | ||
245 | 0 | _aMICRO-NANOFABRICATION : TECHNOLOGIES AND APPLICATIONS | |
260 |
_aCHINA _bSpringer _c2005 |
||
300 | _ax+304p., 24x16Cms. | ||
942 |
_cBK _2DDC |
||
999 |
_c32312 _d32312 |