| 000 | 00370nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a0471784060 | ||
| 082 | _a621.38152 M466 | ||
| 100 | _aMAY,G.S | ||
| 245 | 0 | _aFUNDAMENTALS OF SEMICONDUCTOR MANUFACTURING AND PROCESS CONTROL | |
| 260 |
_aNew Jersey _bWiley _c2006 |
||
| 300 | _axix+463p.,24X16Cms. | ||
| 942 |
_cBK _2DDC |
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| 999 |
_c32518 _d32518 |
||