000 00324nam a2200133Ia 4500
008 190711s9999 xx 000 0 und d
020 _a0131472860
082 _a621.3 L783
100 _aLIU,C.
245 0 _aFOUNDATIONS OF MEMS
260 _aNew Jersey
_bPEARSON
_c2006
300 _axxii+530p.,24X20Cms.
942 _cBK
_2DDC
999 _c32852
_d32852