| 000 | 00397nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a0195320176 | ||
| 082 | _a621.38152 C187 | ||
| 100 | _aCAMPBELL ,S.A | ||
| 245 | 0 | _aFABRICATION ENGINEERING AT THE MICRO AND NANOSCALE | |
| 250 | _a3 | ||
| 260 |
_aNEW YORK _bOxford University Press _c2008 |
||
| 300 | _axiv+647p.,23x19Cms. | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c34628 _d34628 |
||