| 000 | 00356nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a978081551582 | ||
| 082 | _a620.112 L973 | ||
| 100 | _aLUTTGE, R. | ||
| 245 | 0 | _aMICROFABRICATION FOR INDUSTRIAL APPLICATIONS | |
| 260 |
_aNEW YORK _bElsevier _c2011 |
||
| 300 | _axvii+289p.;24x19Cms. | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c41129 _d41129 |
||