| 000 | 00401nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 190711s9999 xx 000 0 und d | ||
| 020 | _a0198084808 | ||
| 082 | _a621.38152 C187 | ||
| 100 | _aCOMPBELL, S.A. | ||
| 245 | 0 | _aSCIENCE & ENGINEERING OF MICROELECTRONICS FABRICATION | |
| 250 | _a2 | ||
| 260 |
_aNEW YORK _bOxford University Press _c2007 |
||
| 300 | _axiv+603p.,24x17Cms. | ||
| 942 |
_cBK _2DDC |
||
| 999 |
_c42061 _d42061 |
||