000			02827nam a22005415i 4500
001			978-3-662-47023-7
003			DE-He213
005			20200420220222.0
007			cr nn 008mamaa
008			150625s2015 gw | s |||| 0|eng d
020			_a9783662470237 _9978-3-662-47023-7
024	7		_a10.1007/978-3-662-47023-7 _2doi
050		4	_aTK7800-8360
050		4	_aTK7874-7874.9
072		7	_aTJF _2bicssc
072		7	_aTEC008000 _2bisacsh
072		7	_aTEC008070 _2bisacsh
082	0	4	_a621.381 _223
100	1		_aSchomburg, Werner Karl. _eauthor.
245	1	0	_aIntroduction to Microsystem Design _h[electronic resource] / _cby Werner Karl Schomburg.
250			_a2nd ed. 2015.
264		1	_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg : _bImprint: Springer, _c2015.
300			_aXXIV, 374 p. 380 illus., 332 illus. in color. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aRWTHedition, _x1865-0899
505	0		_aScaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Electrical Measurements -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies of physical domains -- Mechanical devices for electronics.
520			_aThis book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.  .
650		0	_aEngineering.
650		0	_aNanotechnology.
650		0	_aElectronics.
650		0	_aMicroelectronics.
650		0	_aElectronic circuits.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aCircuits and Systems.
650	2	4	_aNanotechnology and Microengineering.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783662470220
830		0	_aRWTHedition, _x1865-0899
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-662-47023-7
912			_aZDB-2-ENG
942			_cEBK
999			_c51984 _d51984