| 000 | 02518nam a22005175i 4500 | ||
|---|---|---|---|
| 001 | 978-3-662-44395-8 | ||
| 003 | DE-He213 | ||
| 005 | 20200421111705.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 150102s2015 gw | s |||| 0|eng d | ||
| 020 |
_a9783662443958 _9978-3-662-44395-8 |
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| 024 | 7 |
_a10.1007/978-3-662-44395-8 _2doi |
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| 050 | 4 | _aT174.7 | |
| 072 | 7 |
_aTDPB _2bicssc |
|
| 072 | 7 |
_aTEC027000 _2bisacsh |
|
| 082 | 0 | 4 |
_a620.5 _223 |
| 100 | 1 |
_aGatzen, Hans H. _eauthor. |
|
| 245 | 1 | 0 |
_aMicro and Nano Fabrication _h[electronic resource] : _bTools and Processes / _cby Hans H. Gatzen, Volker Saile, J�urg Leuthold. |
| 264 | 1 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg : _bImprint: Springer, _c2015. |
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| 300 |
_aXXVI, 519 p. 357 illus., 54 illus. in color. _bonline resource. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_aonline resource _bcr _2rdacarrier |
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| 347 |
_atext file _bPDF _2rda |
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| 505 | 0 | _aIntroduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example. | |
| 520 | _aFor Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. | ||
| 650 | 0 | _aEngineering. | |
| 650 | 0 | _aNanotechnology. | |
| 650 | 0 | _aManufacturing industries. | |
| 650 | 0 | _aMachines. | |
| 650 | 0 | _aTools. | |
| 650 | 0 | _aIndustrial engineering. | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aNanotechnology and Microengineering. |
| 650 | 2 | 4 | _aManufacturing, Machines, Tools. |
| 650 | 2 | 4 | _aOperating Procedures, Materials Treatment. |
| 700 | 1 |
_aSaile, Volker. _eauthor. |
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| 700 | 1 |
_aLeuthold, J�urg. _eauthor. |
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| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783662443941 |
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-3-662-44395-8 |
| 912 | _aZDB-2-ENG | ||
| 942 | _cEBK | ||
| 999 |
_c55221 _d55221 |
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