000 03437nam a22005655i 4500
001 978-1-4614-8517-9
003 DE-He213
005 20200421112043.0
007 cr nn 008mamaa
008 131030s2013 xxu| s |||| 0|eng d
020 _a9781461485179
_9978-1-4614-8517-9
024 7 _a10.1007/978-1-4614-8517-9
_2doi
050 4 _aTK7800-8360
050 4 _aTK7874-7874.9
072 7 _aTJF
_2bicssc
072 7 _aTEC008000
_2bisacsh
072 7 _aTEC008070
_2bisacsh
082 0 4 _a621.381
_223
100 1 _aDoll, Joseph C.
_eauthor.
245 1 0 _aPiezoresistor Design and Applications
_h[electronic resource] /
_cby Joseph C. Doll, Beth L. Pruitt.
264 1 _aNew York, NY :
_bSpringer New York :
_bImprint: Springer,
_c2013.
300 _aXI, 245 p. 101 illus., 86 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aMicrosystems and Nanosystems ;
_v1
505 0 _aIntroduction -- Piezoresistance fundamentals -- Sensitivity, noise and resolution -- Fabrication and process modeling -- Temperature effects -- Design optimization -- Alternative materials and transduction methods.
520 _aThis book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators. This book also: �         Demonstrates how the latest piezoresistor models and optimization techniques can be integrated for high performance piezoresistor design �         Covers in detail piezoresistor sensitivity and noise models, signal conditioning, fabrication processes, low-power design and numerical optimization techniques �         Provides an up-to-date discussion of alternative piezoresistive materials and MEMS transduction techniques �         Explores in detail the tradeoffs in size, performance and complexity between piezoresistive sensing and popular alternatives (capacitive, piezoelectric and optical transduction) Piezoresistor Design and Applications addresses all aspects of piezoresistor design, fabrication, modeling and optimization and is an ideal book for MEMS designers, process engineers and researchers.
650 0 _aEngineering.
650 0 _aMechanics.
650 0 _aMechanics, Applied.
650 0 _aElectronics.
650 0 _aMicroelectronics.
650 0 _aOptical materials.
650 0 _aElectronic materials.
650 1 4 _aEngineering.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
650 2 4 _aOptical and Electronic Materials.
650 2 4 _aTheoretical and Applied Mechanics.
700 1 _aPruitt, Beth L.
_eauthor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9781461485162
830 0 _aMicrosystems and Nanosystems ;
_v1
856 4 0 _uhttp://dx.doi.org/10.1007/978-1-4614-8517-9
912 _aZDB-2-ENG
942 _cEBK
999 _c56744
_d56744