000 03773nam a2200853 i 4500
001 5271223
003 IEEE
005 20200421114116.0
006 m o d
007 cr |n|||||||||
008 100317t20151994njua ob 001 0 eng d
020 _a9780470544273
_qelectronic
020 _z9780780347144
_qprint
020 _z0470544279
_qelectronic
024 7 _a10.1109/9780470544273
_2doi
035 _a(CaBNVSL)mat05271223
035 _a(IDAMS)0b000064810cc99a
040 _aCaBNVSL
_beng
_erda
_cCaBNVSL
_dCaBNVSL
050 4 _aTA2020
_b.G75 1994eb
082 0 4 _a621.044
_222
100 1 _aGrill, Alfred,
_eauthor.
245 1 0 _aCold plasma in materials fabrication :
_bfrom fundamentals to applications /
_cAlfred Grill.
264 1 _aPiscataway, New Jersey :
_bIEEE Press,
_cc1994.
264 2 _a[Piscataqay, New Jersey] :
_bIEEE Xplore,
_c[1994]
300 _a1 PDF (xiii, 257 pages) :
_billustrations.
336 _atext
_2rdacontent
337 _aelectronic
_2isbdmedia
338 _aonline resource
_2rdacarrier
504 _aIncludes bibliographical references and index.
505 0 _a1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
506 1 _aRestricted to subscribers or individual electronic text purchasers.
520 _aCold plasma research and development activities, as well as its applications in materials processing have grown enormously in the past decade. Cold Plasma in Materials Fabrication is a comprehensive, up-to-date monograph which presents all aspects of cold, low-pressure plasmas. The eight extensive chapters in this book cover the following topics: . The main parameters and classifications of different types of plasma. Reactions within cold plasmas and between cold plasmas and solid surfaces. State-of-the-art methods for generation and diagnostics of cold plasmas and their application for processing of materials This invaluable reference tool provides a helpful bibliography with suggestions for further reading on each subject. The book will be of importance to manufacturing engineers and scientists, as well as advanced students in engineering, materials, physics, and chemistry programs.
530 _aAlso available in print.
538 _aMode of access: World Wide Web
588 _aDescription based on PDF viewed 12/21/2015.
650 0 _aPlasma engineering.
650 0 _aLow temperature plasmas.
650 0 _aManufacturing processes.
655 0 _aElectronic books.
695 _aAdhesives
695 _aAtomic measurements
695 _aBiographies
695 _aCathodes
695 _aChemical vapor deposition
695 _aChemicals
695 _aDischarges
695 _aElectric fields
695 _aElectrodes
695 _aEtching
695 _aGases
695 _aGlow discharges
695 _aIndexes
695 _aInductors
695 _aIonization
695 _aIons
695 _aNitrogen
695 _aPlasma chemistry
695 _aPlasma diagnostics
695 _aPlasma temperature
695 _aPlasmas
695 _aPlastics
695 _aPolymer films
695 _aPolymers
695 _aRadio frequency
695 _aSpectroscopy
695 _aSubstrates
695 _aSurface cleaning
695 _aSurface treatment
710 2 _aJohn Wiley & Sons,
_epublisher.
710 2 _aIEEE Xplore (Online service),
_edistributor.
776 0 8 _iPrint version:
_z9780780347144
856 4 2 _3Abstract with links to resource
_uhttp://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5271223
942 _cEBK
999 _c59545
_d59545