000			04393nam a2201237 i 4500
001			5273520
003			IEEE
005			20200421114116.0
006			m o d
007			cr |n|||||||||
008			151221s1997 nyua ob 001 eng d
020			_a9780470545263 _qelectronic
020			_z9780780310858 _qprint
020			_z0470545267 _qelectronic
024	7		_a10.1109/9780470545263 _2doi
035			_a(CaBNVSL)mat05273520
035			_a(IDAMS)0b000064810d107e
040			_aCaBNVSL _beng _erda _cCaBNVSL _dCaBNVSL
050		4	_aTK7874 _b.M4876 1997eb
082	0	4	_a621.381 _222
245	0	0	_aMicromechanics and MEMS : _bclassic and seminal papers to 1990 / _cedited by William S. Trimmer.
264		1	_aNew York : _bIEEE Press, _c1997.
264		2	_a[Piscataqay, New Jersey] : _bIEEE Xplore, _c[1997]
300			_a1 PDF (xv, 701 pages) : _billustrations.
336			_atext _2rdacontent
337			_aelectronic _2isbdmedia
338			_aonline resource _2rdacarrier
500			_a"A selected reprint volume."
504			_aIncludes bibliographical references and index.
505	0		_aEarly papers in micromechanics -- Side drive actuators -- Comb drive actuators -- Electrostatic actuators -- Magnetic actuators -- Harmonic motors -- Other actuators : Thermal ; Shape memory alloy ; Impact ; Piezoelectric -- Values and pumps -- Fluidics -- Surface micromachining -- Bulk micromachining -- LIGA -- Computer aided design -- Metrology.
506	1		_aRestricted to subscribers or individual electronic text purchasers.
520			_aMicromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer.
530			_aAlso available in print.
538			_aMode of access: World Wide Web
588			_aDescription based on PDF viewed 12/21/2015.
650		0	_aMicroelectronics.
650		0	_aMicroelectromechanical systems.
650		0	_aActuators.
655		0	_aElectronic books.
695			_aAccuracy
695			_aActuators
695			_aAdhesives
695			_aAnnealing
695			_aBiographies
695			_aBiology
695			_aBiomembranes
695			_aBridges
695			_aCavity resonators
695			_aComputers
695			_aElectric fields
695			_aElectrodes
695			_aElectron microscopy
695			_aElectrostatic actuators
695			_aElectrostatics
695			_aEtching
695			_aFabrication
695			_aFilms
695			_aFingers
695			_aFluidics
695			_aFluids
695			_aForce
695			_aGears
695			_aGold
695			_aHarmonic analysis
695			_aHeating
695			_aIndexes
695			_aInsulation
695			_aIntegrated circuit modeling
695			_aMagnetic cores
695			_aMagnetic levitation
695			_aManipulators
695			_aMaterials
695			_aMathematical model
695			_aMetals
695			_aMicrostructure
695			_aOptical sensors
695			_aPolymers
695			_aQ factor
695			_aResistance
695			_aResists
695			_aRotors
695			_aSemiconductor process modeling
695			_aSensors
695			_aShafts
695			_aSilicon
695			_aSolid modeling
695			_aSprings
695			_aStators
695			_aStrain
695			_aStructural beams
695			_aSubstrates
695			_aSuperconducting magnets
695			_aSuspensions
695			_aSynchronous motors
695			_aTorque
695			_aValves
695			_aWire
695			_aWriting
700	1		_aTrimmer, W.
710	2		_aJohn Wiley & Sons, _epublisher.
710	2		_aInstitute of Electrical and Electronics Engineers.
710	2		_aIEEE Xplore (Online service), _edistributor.
776	0	8	_iPrint version: _z9780780310858
856	4	2	_3Abstract with links to resource _uhttp://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520
942			_cEBK
999			_c59565 _d59565