000 | 04791cam a2200637Ii 4500 | ||
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001 | on1085348592 | ||
003 | OCoLC | ||
005 | 20220711203454.0 | ||
006 | m o d | ||
007 | cr cnu|||unuuu | ||
008 | 190211s2019 gw ob 001 0 eng d | ||
040 |
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016 | 7 |
_a019253713 _2Uk |
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019 |
_a1085592940 _a1104299158 _a1104392774 |
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020 |
_a9783527818662 _q(electronic bk.) |
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020 |
_a3527818669 _q(electronic bk.) |
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020 |
_a9783527818655 _q(electronic bk. ; _qoBook) |
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020 |
_a3527818650 _q(electronic bk. ; _qoBook) |
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020 | _a352734523X | ||
020 | _a9783527345236 | ||
020 | _z9783527345236 | ||
029 | 1 |
_aAU@ _b000065193783 |
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029 | 1 |
_aCHNEW _b001039346 |
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029 | 1 |
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029 | 1 |
_aUKMGB _b019253713 |
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035 |
_a(OCoLC)1085348592 _z(OCoLC)1085592940 _z(OCoLC)1104299158 _z(OCoLC)1104392774 |
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037 |
_a9783527818662 _bWiley |
||
050 | 4 | _aTP159.C3 | |
072 | 7 |
_aSCI _x013060 _2bisacsh |
|
072 | 7 |
_aTEC _x009010 _2bisacsh |
|
082 | 0 | 4 |
_a660.2995 _223 |
049 | _aMAIN | ||
100 | 1 |
_aMatsumura, H. _q(Hideki), _eauthor. _98006 |
|
245 | 1 | 0 |
_aCatalytic Chemical Vapor Deposition : _bTechnology and Applications of Cat-CVD / _cHideki Matsumura and 3 others. |
264 | 1 |
_aWeinheim, Germany : _bWiley-VCH, _c[2019] |
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300 | _a1 online resource | ||
336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
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505 | 0 | _aFundamentals for Studying the Physics of Cat-CVD and Difference from PECVD -- Fundamentals for Analytical Methods for Revealing Chemical Reactions in Cat-CVD -- Physics and Chemistry of Cat-CVD -- Properties of Inorganic Films Prepared by Cat-CVD -- Organic Polymer Synthesis by Cat-CVD-Related Technology -- Initiated CVD (iCVD) -- Physics and Technologies for Operating Cat-CVD Apparatus -- Application of Cat-CVD Technologies -- Radicals Generated in Cat-CVD Apparatus and Their Application -- Cat-doping: A Novel Low-Temperature Impurity Doping Technology. | |
504 | _aIncludes bibliographical references and index. | ||
588 | 0 | _aOnline resource; title from PDF title page (EBSCO, viewed February 13, 2019). | |
520 | _aThe authoritative reference on catalytic chemical vapor deposition'written by the inventor of the technology This comprehensive book covers a wide scope of Cat-CVD and related technologies'from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field'including the father of catalytic chemical vapor deposition'it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques. Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep ultra-violet absorption, and explains in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of this unique book are devoted to the design and operation of Cat-CVD apparatuses and the applications.-Provides coherent coverage of the fundamentals and applications of catalytic chemical vapor deposition (Cat-CVD) -Assembles in one place the state of the art of this rapidly growing field, allowing new researchers to get an overview that is difficult to obtain solely from journal articles -Presents comparisons of different Cat-CVD methods which are usually not found in research papers -Bridges academic and industrial research'showing how CVD can be scaled up from the lab to large-scale industrial utilization in the high-tech industry Catalytic Chemical Vapor Deposition: Technology and Applications is an excellent one-stop resource for researchers and engineers working on or entering the field of Cat-CVD, Hot-Wire CVD, iCVD, and related technologies. | ||
650 | 0 |
_aCatalysts. _98007 |
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650 | 0 |
_aChemical vapor deposition. _98008 |
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650 | 7 |
_aSCIENCE _xChemistry _xIndustrial & Technical. _2bisacsh _95357 |
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650 | 7 |
_aTECHNOLOGY & ENGINEERING _xChemical & Biochemical. _2bisacsh _94706 |
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650 | 7 |
_aCatalysts. _2fast _0(OCoLC)fst00848875 _98007 |
|
650 | 7 |
_aChemical vapor deposition. _2fast _0(OCoLC)fst00853229 _98008 |
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655 | 4 |
_aElectronic books. _93294 |
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776 | 0 | 8 |
_cOriginal _z352734523X _z9783527345236 _w(OCoLC)1028165603 |
856 | 4 | 0 |
_uhttps://doi.org/10.1002/9783527818655 _zWiley Online Library |
942 | _cEBK | ||
994 |
_aC0 _bDG1 |
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999 |
_c68998 _d68998 |