000			01986cam a2200337Ii 4500
001			9781315216393
008			180331s2013 fluad ob 001 0 eng d
020			_a9781315216393 _q(e-book : PDF)
020			_a9781351823593 _q(e-book: Mobi)
020			_a9781466515826 _q(e-book: PDF)
020			_z9781466515819 _q(hardback)
020			_z9781138072305 _q(paperback)
024	7		_a10.1201/b14970 _2doi
035			_a(OCoLC)849918860
050		4	_aTK7875 _b.M457 2013
082	0	4	_a621.381 _bM533
245	0	0	_aMEMS : _bfundamental technology and applications / _ceditors, Vikas Choudhary, Krzysztof Iniewski.
264		1	_aBoca Raton : _bTaylor & Francis, _c2013.
300			_a1 online resource (xxii, 456 pages)
490	1		_aDevices, circuits, and systems
505	0		_asection 1. Breakthrough technology -- section 2. MEMS-based novel applications.
520			_aWritten by international experts, this book presents the latest research in the field of MEMS technology and the myriad applications that it has enabled. The text covers automotive, consumer, communication, and medical applications of MEMs. Some of the applications discussed include high-precision on-chip integrated oscillators for reference generations, gyroscopes in cameras for optical image stabilization, radio communication, bio-implantable kidneys, and mobile phones. Other chapters address MEMS packaging and MEMS resonators, providing a fundamental understanding to enable novel applications. There is also a chapter outlining the historical evolution of current nano micro systems-- _cProvided by publisher.
650		0	_aMicroelectromechanical systems. _96063
650		0	_aMicroelectronic packaging. _94867
700	1		_aChoudhary, Vikas. _917524
700	1		_aIniewski, Krzysztof. _914004
776	0	8	_iPrint version: _z9781466515819
830		0	_aDevices, circuits, and systems. _912115
856	4	0	_uhttps://www.taylorfrancis.com/books/9781315216393 _zClick here to view.
942			_cEBK
999			_c71550 _d71550