| 000 | 03202nam a2200997 i 4500 | ||
|---|---|---|---|
| 001 | 5628438 | ||
| 003 | IEEE | ||
| 005 | 20220712205747.0 | ||
| 006 | m o d | ||
| 007 | cr |n||||||||| | ||
| 008 | 151221s2010 nju ob 001 eng d | ||
| 010 | _z 2010007955 (print) | ||
| 020 |
_a9780470649671 _qebook |
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| 020 |
_z9780470466346 _qcloth |
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| 020 |
_z0470466340 _qcloth |
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| 020 |
_z0470649674 _qelectronic |
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| 024 | 7 |
_a10.1002/9780470649671 _2doi |
|
| 035 | _a(CaBNVSL)mat05628438 | ||
| 035 | _a(IDAMS)0b0000648138cdb9 | ||
| 040 |
_aCaBNVSL _beng _erda _cCaBNVSL _dCaBNVSL |
||
| 050 | 4 |
_aTK7875 _b.P75 2011eb |
|
| 082 | 0 | 0 |
_a621.381 _222 |
| 100 | 1 |
_aLee, Ki Bang, _eauthor. _927539 |
|
| 245 | 1 | 0 |
_aPrinciples of microelectromechanical systems / _cKi Bang Lee. |
| 246 | 3 | _aPrinciples of MEMS | |
| 264 | 1 |
_aHoboken, New Jersey : _bWILEY/IEEE Press, _cc2011. |
|
| 264 | 2 |
_a[Piscataqay, New Jersey] : _bIEEE Xplore, _c[2010] |
|
| 300 | _a1 PDF (xii, 667 pages). | ||
| 336 |
_atext _2rdacontent |
||
| 337 |
_aelectronic _2isbdmedia |
||
| 338 |
_aonline resource _2rdacarrier |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 505 | 0 | _aMicrofabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors. | |
| 506 | 1 | _aRestricted to subscribers or individual electronic text purchasers. | |
| 530 | _aAlso available in print. | ||
| 538 | _aMode of access: World Wide Web | ||
| 588 | _aDescription based on PDF viewed 12/21/2015. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _96063 |
|
| 655 | 0 |
_aElectronic books. _93294 |
|
| 695 | _aActuators | ||
| 695 | _aBibliographies | ||
| 695 | _aBridge circuits | ||
| 695 | _aCapacitance | ||
| 695 | _aCapacitors | ||
| 695 | _aClosed-form solution | ||
| 695 | _aDamping | ||
| 695 | _aElectromagnetics | ||
| 695 | _aElectrostatic actuators | ||
| 695 | _aElectrostatics | ||
| 695 | _aEquations | ||
| 695 | _aFabrication | ||
| 695 | _aFace | ||
| 695 | _aFluid dynamics | ||
| 695 | _aForce | ||
| 695 | _aFriction | ||
| 695 | _aGravity | ||
| 695 | _aHeating | ||
| 695 | _aIndexes | ||
| 695 | _aInductors | ||
| 695 | _aMagnetic cores | ||
| 695 | _aManganese | ||
| 695 | _aMaterials | ||
| 695 | _aMathematical model | ||
| 695 | _aMechanical sensors | ||
| 695 | _aMicroelectromechanical systems | ||
| 695 | _aMicroelectronics | ||
| 695 | _aMicromachining | ||
| 695 | _aMicromechanical devices | ||
| 695 | _aMicrostructure | ||
| 695 | _aOscillators | ||
| 695 | _aPetroleum | ||
| 695 | _aResistors | ||
| 695 | _aSensors | ||
| 695 | _aSilicon | ||
| 695 | _aSprings | ||
| 695 | _aStrain | ||
| 695 | _aStress | ||
| 695 | _aStructural beams | ||
| 695 | _aSubstrates | ||
| 700 | 1 |
_aLee, Ki Bang. _927539 |
|
| 710 | 2 |
_aIEEE Xplore (Online Service), _edistributor. _927540 |
|
| 710 | 2 |
_aJohn Wiley & Sons, _epublisher. _96902 |
|
| 776 | 0 | 8 |
_iPrint version: _z9780470466346 |
| 856 | 4 | 2 |
_3Abstract with links to resource _uhttps://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5628438 |
| 942 | _cEBK | ||
| 999 |
_c74095 _d74095 |
||