| 000 | 03030nam a22005655i 4500 | ||
|---|---|---|---|
| 001 | 978-3-319-39361-2 | ||
| 003 | DE-He213 | ||
| 005 | 20220801221635.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 160810s2017 sz | s |||| 0|eng d | ||
| 020 |
_a9783319393612 _9978-3-319-39361-2 |
||
| 024 | 7 |
_a10.1007/978-3-319-39361-2 _2doi |
|
| 050 | 4 | _aTK7875 | |
| 072 | 7 |
_aTJF _2bicssc |
|
| 072 | 7 |
_aTEC027000 _2bisacsh |
|
| 072 | 7 |
_aTJF _2thema |
|
| 082 | 0 | 4 |
_a621.381 _223 |
| 100 | 1 |
_aCui, Zheng. _eauthor. _4aut _4http://id.loc.gov/vocabulary/relators/aut _957173 |
|
| 245 | 1 | 0 |
_aNanofabrication _h[electronic resource] : _bPrinciples, Capabilities and Limits / _cby Zheng Cui. |
| 250 | _a2nd ed. 2017. | ||
| 264 | 1 |
_aCham : _bSpringer International Publishing : _bImprint: Springer, _c2017. |
|
| 300 |
_aXVII, 432 p. 316 illus., 50 illus. in color. _bonline resource. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
||
| 338 |
_aonline resource _bcr _2rdacarrier |
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| 347 |
_atext file _bPDF _2rda |
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| 505 | 0 | _a1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies. | |
| 520 | _aThis second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges. | ||
| 650 | 0 |
_aMicrotechnology. _928219 |
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| 650 | 0 |
_aMicroelectromechanical systems. _96063 |
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| 650 | 0 |
_aMechanics, Applied. _93253 |
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| 650 | 0 |
_aSolids. _93750 |
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| 650 | 0 |
_aElectronic circuits. _919581 |
|
| 650 | 0 |
_aElectrodynamics. _93703 |
|
| 650 | 1 | 4 |
_aMicrosystems and MEMS. _957174 |
| 650 | 2 | 4 |
_aSolid Mechanics. _931612 |
| 650 | 2 | 4 |
_aElectronic Circuits and Systems. _957175 |
| 650 | 2 | 4 |
_aClassical Electrodynamics. _931625 |
| 710 | 2 |
_aSpringerLink (Online service) _957176 |
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| 773 | 0 | _tSpringer Nature eBook | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783319393599 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783319393605 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783319818757 |
| 856 | 4 | 0 | _uhttps://doi.org/10.1007/978-3-319-39361-2 |
| 912 | _aZDB-2-ENG | ||
| 912 | _aZDB-2-SXE | ||
| 942 | _cEBK | ||
| 999 |
_c79888 _d79888 |
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