| 000 | 03427nam a22006255i 4500 | ||
|---|---|---|---|
| 001 | 978-3-642-05430-3 | ||
| 003 | DE-He213 | ||
| 005 | 20221102211553.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 150506s2015 gw | s |||| 0|eng d | ||
| 020 |
_a9783642054303 _9978-3-642-05430-3 |
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| 024 | 7 |
_a10.1007/978-3-642-05430-3 _2doi |
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| 050 | 4 | _aTA418.7-418.76 | |
| 050 | 4 | _aTA418.9.T45 | |
| 072 | 7 |
_aTGM _2bicssc |
|
| 072 | 7 |
_aTEC021040 _2bisacsh |
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| 072 | 7 |
_aTGM _2thema |
|
| 082 | 0 | 4 |
_a620.44 _223 |
| 245 | 1 | 0 |
_aHandbook of Thin Film Technology _h[electronic resource] / _cedited by Hartmut Frey, Hamid R. Khan. |
| 250 | _a1st ed. 2015. | ||
| 264 | 1 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg : _bImprint: Springer, _c2015. |
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| 300 |
_aXIII, 379 p. 413 illus. _bonline resource. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_aonline resource _bcr _2rdacarrier |
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| 347 |
_atext file _bPDF _2rda |
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| 505 | 0 | _aApplications and developments of thin film technology -- Importance of the vacuum technology for thin film coatings -- Evaporation in the vacuum -- Basic principle of plasma physics -- Gaseous phase and surface processes -- Coating by cathode sputtering -- Plasma treatment methods -- Ion beam-supported procedures -- Chemical Vapor Deposition (CVD) -- Physical basics of modern methods of surface and thin film analysis -- Measurements of thin layers during the coating -- Measurements of thin layers after terminated coating process -- Nanoparticle Films -- Optical properties of thin films. | |
| 520 | _a“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films. | ||
| 650 | 0 |
_aSurfaces (Technology). _910743 |
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| 650 | 0 |
_aThin films. _97674 |
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| 650 | 0 |
_aMaterials—Analysis. _966653 |
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| 650 | 0 |
_aNanotechnology. _94707 |
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| 650 | 0 |
_aCoatings. _96797 |
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| 650 | 0 |
_aTribology. _94149 |
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| 650 | 0 |
_aCorrosion and anti-corrosives. _96457 |
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| 650 | 1 | 4 |
_aSurfaces, Interfaces and Thin Film. _931793 |
| 650 | 2 | 4 |
_aCharacterization and Analytical Technique. _966654 |
| 650 | 2 | 4 |
_aNanotechnology. _94707 |
| 650 | 2 | 4 |
_aCoatings. _96797 |
| 650 | 2 | 4 |
_aTribology. _94149 |
| 650 | 2 | 4 |
_aCorrosion. _916286 |
| 700 | 1 |
_aFrey, Hartmut. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt _966655 |
|
| 700 | 1 |
_aKhan, Hamid R. _eeditor. _4edt _4http://id.loc.gov/vocabulary/relators/edt _966656 |
|
| 710 | 2 |
_aSpringerLink (Online service) _966657 |
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| 773 | 0 | _tSpringer Nature eBook | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783642102530 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783642054297 |
| 776 | 0 | 8 |
_iPrinted edition: _z9783662500088 |
| 856 | 4 | 0 | _uhttps://doi.org/10.1007/978-3-642-05430-3 |
| 912 | _aZDB-2-CMS | ||
| 912 | _aZDB-2-SXC | ||
| 942 | _cETB | ||
| 999 |
_c81693 _d81693 |
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