000			03492nam a2200373 i 4500
001			CR9780511600302
003			UkCbUP
005			20230516164929.0
006			m|||||o||d||||||||
007			cr||||||||||||
008			090722s2007||||enk o ||1 0|eng|d
020			_a9780511600302 (ebook)
020			_z9780521831994 (hardback)
020			_z9780521158596 (paperback)
040			_aUkCbUP _beng _erda _cUkCbUP
050	0	4	_aQC702.7.B65 _bF63 2007
082	0	4	_a621.38152 _222
245	0	0	_aFocused ion beam systems : _bbasics and applications / _cedited by Nan Yao.
264		1	_aCambridge : _bCambridge University Press, _c2007.
300			_a1 online resource (xi, 395 pages) : _bdigital, PDF file(s).
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
500			_aTitle from publisher's bibliographic system (viewed on 05 Oct 2015).
505	0		_aInteractions of ions with matter / Nobutsugu Imanishi -- Gas assisted ion beam etching and disposition / Hyoung Ho (Chris) Kang, Clive Chandler, and Matthew Weschler -- Imaging using electrons and ion beams / Kaoru Ohya and Tohru Ishitani -- Characterization methods using FIB/SEM DualBeam instrumentation / Steven Reyntjens and Lucille A. Giannuzzi -- High-density FIB SEM 3D nanotomography : with applications of real-time imaging during FIB milling / E.L. Principe -- Fabrication of nanoscale structures using ion beams / Ampere A. Tseng -- Preparation for physico-chemical analysis / Richard Langford -- In-situ sample manipulation and imaging / T. Kamino [and others] -- Micro-machining and mask repair / Mark Utlaut -- Three-dimensional visualization of nanostructured materials using focused ion beam tomography / Derren Dunn, Alan J. Kubis, and Robert Hull -- Ion beam implantation of surface layers / Daniel Recht and Nan Yao -- Applications for biological materials / Kirk Hou and Nan Yao -- Focused ion beam systems as a multifunctional tool for nanotechnology / Toshiaki Fujii, Tatsuya Asahata, and Takashi Kaito.
520			_aThe focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.
650		0	_aFocused ion beams. _911208
650		0	_aFocused ion beams _xIndustrial applications. _968286
650		0	_aIon bombardment. _911939
700	1		_aYao, Nan, _eeditor. _968287
776	0	8	_iPrint version: _z9780521831994
856	4	0	_uhttps://doi.org/10.1017/CBO9780511600302
942			_cEBK
999			_c82321 _d82321