| 000 | 04574cam a2200481 a 4500 | ||
|---|---|---|---|
| 001 | on1202462989 | ||
| 003 | OCoLC | ||
| 005 | 20230516165911.0 | ||
| 006 | m o d | ||
| 007 | cr un|---aucuu | ||
| 008 | 201031s2021 ne o 000 0 eng d | ||
| 040 |
_aEBLCP _beng _epn _cEBLCP _dYDX _dOPELS _dOCLCF _dOCLCO _dOCLCQ _dOCLCO _dK6U _dOCLCQ |
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| 019 | _a1201298452 | ||
| 020 | _a9780128178515 | ||
| 020 | _a0128178515 | ||
| 020 | _z9780128178508 | ||
| 035 |
_a(OCoLC)1202462989 _z(OCoLC)1201298452 |
||
| 050 | 4 | _aTA418.9.N35 | |
| 082 | 0 | 4 | _a620.50287 |
| 100 | 1 |
_aGao, Wei, _cPh. D. _969000 |
|
| 245 | 1 | 0 |
_aSurface metrology for micro- and nanofabrication / _cWei Gao. |
| 260 |
_aAmsterdam : _bElsevier, _c[2021] |
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| 300 | _a1 online resource (452 pages) | ||
| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_aonline resource _bcr _2rdacarrier |
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| 490 | 1 | _aMicro and Nano Technologies Ser. | |
| 588 | 0 | _aPrint version record. | |
| 505 | 0 | _aFront Cover -- Surface Metrology for Micro- and Nanofabrication -- Copyright Page -- Dedication -- Contents -- Preface -- 1 Noncontact scanning electrostatic force microscope -- 1.1 Introduction -- 1.2 Principle of electrostatic force microscope for surface profile measurement -- 1.3 Instrumentation of electrostatic force microscope -- 1.3.1 Instrument configuration -- 1.3.2 Electrostatic force microscope probe fabrication -- 1.3.3 Electrostatic force microscope electronics -- 1.4 Characterization of the electrostatic force microscope -- 1.4.1 Tip-to-sample distance measurement | |
| 505 | 8 | _a1.4.2 Measurement of surface topography -- 1.4.3 The vertical reciprocating scan mode -- 1.5 Summary -- References -- 2 Quartz tuning fork atomic force microscope -- 2.1 Introduction -- 2.2 Tungsten probe QTF-AFM -- 2.2.1 Self-oscillation QTF-AFM -- 2.2.2 External-oscillation QTF-AFM -- 2.3 Glass probe QTF-AFM -- 2.3.1 Fabrication of the glass probe -- 2.3.2 Optimization of the QTF glass probe -- 2.3.3 Surface profile measurement by the QTF glass probe -- 2.4 Summary -- References -- 3 Micropipette ball probing system -- 3.1 Introduction -- 3.2 Fabrication of the micropipette probe | |
| 505 | 8 | _a3.3 The probing system -- 3.4 Measurement of microslit -- 3.5 Summary -- References -- 4 Low-force elastic beam surface profiler -- 4.1 Introduction -- 4.2 Cantilever beam surface profiler -- 4.3 Both ends supported beam surface profiler -- 4.4 Rotary die cutter edge profile measurement -- 4.5 Summary -- References -- 5 Linear-scan micro roundness measuring machine -- 5.1 Introduction -- 5.2 The stitching linear-scan method -- 5.3 Linear-scan micro roundness measuring machine -- 5.4 Improved setup with a round positioning jig -- 5.5 Summary -- References -- 6 Micro-gear measuring machine | |
| 505 | 8 | _a6.1 Introduction -- 6.2 The micro-gear measuring machine -- 6.3 Self-calibration and compensation of setting errors -- 6.4 Internal micro-gear measurement -- 6.5 Summary -- References -- 7 On-machine length gauge surface profiler -- 7.1 Introduction -- 7.2 General issues in on-machine measurement -- 7.3 Satellite mirror surface profiler -- 7.4 Scroll surface profiler -- 7.5 Summary -- References -- 8 On-machine air-bearing surface profiler -- 8.1 Introduction -- 8.2 Horizontal air-bearing profiler -- 8.3 Vertical air-bearing profiler -- 8.4 Dynamic behavior of air-bearing profiler -- 8.5 Summary | |
| 504 | _aReferences-9 On-machine atomic force microscope-9.1 Introduction-9.2 On-machine spiral scan atomic force microscope-9.3 On-machine automatic alignment atomic force microscope-9.4 Summary-References-10 On-machine roll profiler-10.1 Introduction-10.2 On-machine two-probe profiler-10.3 On-machine four-probe profiler-10.4 Summary-References-11 In-process fast tool servo profiler-11.1 Introduction-11.2 Force sensor-integrated fast tool servo-11.3 In-process surface profile measurement-11.4 In-process tool setting-11.5 Summary-References. | ||
| 500 | _a12 Self-calibration of probe tip radius and cutting edge sharpness. | ||
| 650 | 0 |
_aNanostructured materials _xMeasurement. _969001 |
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| 650 | 0 |
_aNanomanufacturing. _917398 |
|
| 650 | 6 |
_aNanofabrication. _0(CaQQLa)000287898 _968562 |
|
| 650 | 7 |
_aNanomanufacturing. _2fast _0(OCoLC)fst01894718 _917398 |
|
| 776 | 0 | 8 |
_iPrint version: _aGao, Wei. _tSurface Metrology for Micro- and Nanofabrication. _dSan Diego : Elsevier, �2020 _z9780128178508 |
| 830 | 0 |
_aMicro & nano technologies. _969002 |
|
| 856 | 4 | 0 |
_3ScienceDirect _uhttps://www.sciencedirect.com/science/book/9780128178508 |
| 942 | _cEBK | ||
| 999 |
_c82503 _d82503 |
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