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001 9783110487473
003 DE-B1597
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006 m|||||o||d||||||||
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008 210830t20182018gw fo d z eng d
010 _a2018007853
020 _a9783110487473
024 7 _a10.1515/9783110487473
_2doi
035 _a(DE-B1597)468725
035 _a(OCoLC)1059296326
040 _aDE-B1597
_beng
_cDE-B1597
_erda
041 0 _aeng
044 _agw
_cDE
050 0 0 _aTK7871.85
_b.Z43 2018
050 4 _aTK7871.85
_b.Z43 2018
072 7 _aTEC020000
_2bisacsh
082 0 4 _a621.39/5
_223
100 1 _aZhang, Jie,
_eauthor.
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
_978386
245 1 0 _aWafer Fabrication :
_bAutomatic Material Handling System /
_cJie Zhang.
264 1 _aBerlin ;
_aBoston :
_bDe Gruyter,
_c[2018]
264 4 _c©2018
300 _a1 online resource (XII, 272 p.)
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 0 _tFrontmatter --
_tPreface --
_tContents --
_t1 Semiconductor wafer fabrication system --
_t2 Automated material handling systems in SWFSs --
_t3 Modeling methods of automated material handling systems in SWFSs --
_t4 Analysis of automated material handling systems in SWFSs --
_t5 Scheduling methods of automated material handling systems in SWFSs --
_t6 Scheduling in Interbay automated material handling systems --
_t7 Scheduling in Intrabay automatic material handling systems --
_t8 Integrated scheduling in AMHSs --
_t9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs --
_tIndex
506 0 _arestricted access
_uhttp://purl.org/coar/access_right/c_16ec
_fonline access with authorization
_2star
520 _aThis book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
538 _aMode of access: Internet via World Wide Web.
546 _aIn English.
588 0 _aDescription based on online resource; title from PDF title page (publisher's Web site, viewed 30. Aug 2021)
650 0 _aManufacturing processes
_xAutomatic control.
_978387
650 0 _aSemiconductor wafers
_xAutomatic control.
_978388
650 7 _aTechnology & Engineering / Manufacturing.
_2bisacsh
_978389
700 1 _aHuazhong University of Science and Technology,.
_978390
773 0 8 _iTitle is part of eBook package:
_dDe Gruyter
_tDG Plus eBook-Package 2018
_z9783110719550
773 0 8 _iTitle is part of eBook package:
_dDe Gruyter
_tEBOOK PACKAGE COMPLETE 2018 English
_z9783110604252
773 0 8 _iTitle is part of eBook package:
_dDe Gruyter
_tEBOOK PACKAGE COMPLETE 2018
_z9783110603255
_oZDB-23-DGG
773 0 8 _iTitle is part of eBook package:
_dDe Gruyter
_tEBOOK PACKAGE Engineering, Computer Sciences 2018 English
_z9783110604023
773 0 8 _iTitle is part of eBook package:
_dDe Gruyter
_tEBOOK PACKAGE Engineering, Computer Sciences 2018
_z9783110603118
_oZDB-23-DEI
776 0 _cEPUB
_z9783110487237
776 0 _cprint
_z9783110486902
856 4 0 _uhttps://doi.org/10.1515/9783110487473
856 4 0 _uhttps://www.degruyter.com/isbn/9783110487473
856 4 2 _3Cover
_uhttps://www.degruyter.com/cover/covers/9783110487473.jpg
912 _a978-3-11-060402-3 EBOOK PACKAGE Engineering, Computer Sciences 2018 English
_b2018
912 _a978-3-11-060425-2 EBOOK PACKAGE COMPLETE 2018 English
_b2018
912 _a978-3-11-071955-0 DG Plus eBook-Package 2018
_b2018
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