| 000 | 00375nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 190706s9999 xx 000 0 und d | ||
| 020 | _a1-57444-675-4 | ||
| 082 | _a621.38152 D652 | ||
| 100 | _aDOERING,R. | ||
| 245 | 0 | _aHANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY | |
| 250 | _a2 | ||
| 260 |
_aBoca Raton _bCRC _c2008 |
||
| 300 | _a1600p.,26x18Cms. | ||
| 942 |
_cREF _2DDC |
||
| 999 |
_c8555 _d8555 |
||